DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Im, Sung Gap | - |
dc.contributor.advisor | 임성갑 | - |
dc.contributor.author | Park, Hongkeun | - |
dc.date.accessioned | 2021-05-11T19:42:08Z | - |
dc.date.available | 2021-05-11T19:42:08Z | - |
dc.date.issued | 2020 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=901581&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/283493 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 생명화학공학과, 2020.2,[viii, 80 p. :] | - |
dc.description.abstract | Organic electronics has been spotlighted for the next generation electronic devices due to the advantages in flexibility, lightweightness and various form-factors. Most research is focused on the improvement in performance of the ogranic semiconductor based devices due to its inferior mobility compared to the conventional silicon semiconductor. However, there are lack of research in the organic semiconductor based integrated circuits and related technology, because the organic materials have poor robustness in chemical and thermal stress. In this thesis, the polymer dielectric layers werer patterned while initiated chemical vapor deposition (iCVD) process, to fabricated organic integrated circuits and to suggest a novel interconnection and device scheme. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | Organic electronics▼aInitiated chemical vapor deposition▼aDielectric layer▼apatterning▼aOrganic integrated circuits | - |
dc.subject | 유기 전자▼a기상 증착 고분자▼a절연막▼a패터닝▼a유기 집적회로 | - |
dc.title | Patterning of vapor phase deposited polymer dielectric thin film for organic integrated circuits | - |
dc.title.alternative | 기상 증착 고분자 절연 박막의 패터닝과 이를 통한 유기 회로 구현 | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :생명화학공학과, | - |
dc.contributor.alternativeauthor | 박홍근 | - |
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