Fully laser-patterned stretchable microsupercapacitors integrated with soft electronic circuit components

Abstract

Stretchable energy storage devices are prerequisites for the realization of autonomous elastomeric electronics. Microsupercapacitors (MSCs) are promising candidates for this purpose due to their high power and energy densities, potential for miniaturization, and feasibility of embedding in circuits; however, efforts to realize stretchable MSCs have mostly relied on strain-accommodating materials and have suffered from limited stretchability, low conductivity, or complicated patterning processes. Here, we designed and fabricated a stretchable MSC based on reduced-graphene-oxide/Au heterostructures patterned by facile and versatile direct laser patterning. An interconnected and stable 3D network composed of vertically oriented heterostructures was realized by high-repetition-rate femtosecond laser pulses. Upon transferring to polydimethylsiloxane (PDMS), the 3D network achieved a high conductivity of ~10