학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2016.2,[vi, 44 p. :]
Electrostatic actuator▼aMEMS▼apre-charging method▼apre-charge loss▼aretention time▼avertical-type; 정전구동 엑츄에이터▼a멤스▼a선-충전 방법▼a선-충전 전하 손실▼a지속시간▼a버티컬구조
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