DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Yoon, Jun-Bo | - |
dc.contributor.advisor | 윤준보 | - |
dc.contributor.author | Kim, Kyeong-Hun | - |
dc.date.accessioned | 2019-09-04T02:43:17Z | - |
dc.date.available | 2019-09-04T02:43:17Z | - |
dc.date.issued | 2016 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=849899&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/266869 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2016.2,[vi, 44 p. :] | - |
dc.description.abstract | High actuation voltage which reaches tens of volts is the bottleneck in the electrostatic actuators field. Pre-charging method has proposed to solve this problem. This novel method can dramatically reduce the actuation voltage while maintaining the large contact-force. However, this previous work has limitation to apply it to micro-actuators. The retention time performance is too short and vertical-type structure has not yet been demonstrated. Therefore, this thesis analyzes the precharge loss problem to prolong the retention time and realizes the pre-charging system with vertical-type microelectromechanical switch. In conclusion, we can improve the retention time by utilizing Benzocyclobutene (BCB) substrate and charge-tank structure. Furthermore, we demonstrate the vertical-type pre-charging system through measuring the actuation voltage and contact-resistance, depending on the pre-charging voltage level. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | Electrostatic actuator▼aMEMS▼apre-charging method▼apre-charge loss▼aretention time▼avertical-type | - |
dc.subject | 정전구동 엑츄에이터▼a멤스▼a선-충전 방법▼a선-충전 전하 손실▼a지속시간▼a버티컬구조 | - |
dc.title | Study on pre-charge loss for application of pre-charging method to electrostatic micro-actuators | - |
dc.title.alternative | 정전구동 마이크로 엑츄에이터에 선-충전 방법 적용을 위한 전하 손실에 관한 연구 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :전기및전자공학부, | - |
dc.contributor.alternativeauthor | 김경훈 | - |
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