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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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(The) photolithography simulation using the finite element method = 유한요소법을 이용한 Photolithography simulationlink Hong, Hun-Soo; 홍헌수; Kim, Soo-Yong; 김수용, 한국과학기술원, 1997 |
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