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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Attenuated phase shifting mask용 $CrF_x$ Film의 특성 분석 및 모사 연구 = Characterization and simulation study of $CrF_x$ films for attenuated phase shifting masklink

김은아; Kim, Eun-Ah; 노광수; No, Kwang-Soo, 한국과학기술원, 1997

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