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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Si 기판위에 Hot filmanent CVD법으로 제조된 다이아몬드 박막의 응력 해석 = Stress analysis in diamond thin films on Si wafer deposited by hot filament chemical vapor depositionlink 차승일; Cha, Seung-Il; 홍순형; Hong, Soon-Hyung, 한국과학기술원, 1998 |
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