Si 기판위에 Hot filmanent CVD법으로 제조된 다이아몬드 박막의 응력 해석 = Stress analysis in diamond thin films on Si wafer deposited by hot filament chemical vapor deposition

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Advisors
홍순형researcherHong, Soon-Hyungresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1998
Identifier
133561/325007 / 000963612
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1998.2, [ 85 p. ]

Keywords

열처리; 잔류응력; 다이아몬드박막; 화학기상증착; Annealing; CVD; Stress; Diamond thin film

URI
http://hdl.handle.net/10203/50690
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133561&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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