Methacrylate oligosiloxane-based hybrid materials (methacrylate hybrimers) were fabricated by curing the methacrylate oligosiloxane resins synthesized by sol-gel condensation reaction of 3-(trimethoxysilyl)propyl methacrylate (MPTS) and diphenylsilanediol (DPSD) for the LED encapsulant application. The fabricated hybrimers are optically transparent and have a high refractive index up to 1.565 depending on the precursor composition. The lower DPSD content hybrimer, which is the more polymerized and heated in a vacuum to remove the non-polymerized methacrylate groups, produces higher optical transmittance and thermal stability. This behavior is interpreted by thermal degradation of methacylate groups in the hybrimers.