DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Sang-Hyeon | ko |
dc.contributor.author | Yokoyama, Masafumi | ko |
dc.contributor.author | Nakane, Ryosho | ko |
dc.contributor.author | Ichikawa, Osamu | ko |
dc.contributor.author | Osada, Takenori | ko |
dc.contributor.author | Hata, Masahiko | ko |
dc.contributor.author | Takenaka, Mitsuru | ko |
dc.contributor.author | Takagi, Shinichi | ko |
dc.date.accessioned | 2019-02-20T04:58:26Z | - |
dc.date.available | 2019-02-20T04:58:26Z | - |
dc.date.created | 2019-02-07 | - |
dc.date.issued | 2014-05 | - |
dc.identifier.citation | IEEE TRANSACTIONS ON ELECTRON DEVICES, v.61, no.5, pp.1354 - 1360 | - |
dc.identifier.issn | 0018-9383 | - |
dc.identifier.uri | http://hdl.handle.net/10203/250286 | - |
dc.description.abstract | We have investigated the effects of the tri-gate channel structure on electrical properties of extremely thin-body (ETB) InAs-on-insulator (-OI) MOSFETs. It was found that the tri-gate structure provides significant improvement in short channel effect (SCE) control even in ETB-OI MOSFETs by the simulation. We have fabricated and demonstrated tri-gate InAsOI MOSFETs with fin width of the top surface down to 40 nm. The tri-gate ETB InAs-OI MOSFETs shows better SCEs control with small effective mobility (mu(eff)) reduction. Thus, we have demonstrated the operation of sub-20-nm-channel length (L-ch) InAs-OI MOSFETs. The 20-nm-L-ch InAs-OI MOSFETs show good electrostatic with subthreshold slope of 120 mV/decade and drain induced barrier lowering of 110 mV/V, and high transconductance (G(m)) of 1.64 mS/mu m. Furthermore, we have realized a wide-range threshold voltage (V-th) tunability in tri-gate InAs-OI MOSFETs through back bias voltage (V-B) control. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.title | High Performance Tri-Gate Extremely Thin-Body InAs-On-Insulator MOSFETs With High Short Channel Effect Immunity and V-th Tunability | - |
dc.type | Article | - |
dc.identifier.wosid | 000337753300020 | - |
dc.identifier.scopusid | 2-s2.0-84899924195 | - |
dc.type.rims | ART | - |
dc.citation.volume | 61 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 1354 | - |
dc.citation.endingpage | 1360 | - |
dc.citation.publicationname | IEEE TRANSACTIONS ON ELECTRON DEVICES | - |
dc.identifier.doi | 10.1109/TED.2014.2312546 | - |
dc.contributor.nonIdAuthor | Yokoyama, Masafumi | - |
dc.contributor.nonIdAuthor | Nakane, Ryosho | - |
dc.contributor.nonIdAuthor | Ichikawa, Osamu | - |
dc.contributor.nonIdAuthor | Osada, Takenori | - |
dc.contributor.nonIdAuthor | Hata, Masahiko | - |
dc.contributor.nonIdAuthor | Takenaka, Mitsuru | - |
dc.contributor.nonIdAuthor | Takagi, Shinichi | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
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