DC Field | Value | Language |
---|---|---|
dc.contributor.author | Do, Hyung Wan | ko |
dc.contributor.author | Chang, Jae-Byum | ko |
dc.contributor.author | Berggren, Karl K. | ko |
dc.date.accessioned | 2018-09-18T06:24:57Z | - |
dc.date.available | 2018-09-18T06:24:57Z | - |
dc.date.created | 2018-09-04 | - |
dc.date.created | 2018-09-04 | - |
dc.date.created | 2018-09-04 | - |
dc.date.issued | 2014-11 | - |
dc.identifier.citation | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.32, no.6 | - |
dc.identifier.issn | 1071-1023 | - |
dc.identifier.uri | http://hdl.handle.net/10203/245594 | - |
dc.description.abstract | In this work, the authors developed two processes for fabricating three-dimensional (3D) nanostructures using a hydrogen silsesquioxane and poly(methylmethacrylate) bilayer resist stack. The resist stack was patterned in a single electron-beam writing step without removing the wafer. The resulting 3D nanostructures naturally achieved vertical self-alignment without the need for any intermediate alignment. Self-aligned mushroom-shaped posts and freestanding supported structures were demonstrated. (C) 2014 American Vacuum Society. | - |
dc.language | English | - |
dc.publisher | A V S AMER INST PHYSICS | - |
dc.subject | ELECTRON-BEAM LITHOGRAPHY | - |
dc.subject | SILSESQUIOXANE | - |
dc.subject | NANOSTRUCTURES | - |
dc.subject | FABRICATION | - |
dc.title | Three-dimensional nanofabrication using hydrogen silsesquioxane/poly(methylmethacrylate) bilayer resists | - |
dc.type | Article | - |
dc.identifier.wosid | 000345512800004 | - |
dc.identifier.scopusid | 2-s2.0-84949146817 | - |
dc.type.rims | ART | - |
dc.citation.volume | 32 | - |
dc.citation.issue | 6 | - |
dc.citation.publicationname | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | - |
dc.identifier.doi | 10.1116/1.4893659 | - |
dc.contributor.localauthor | Chang, Jae-Byum | - |
dc.contributor.nonIdAuthor | Do, Hyung Wan | - |
dc.contributor.nonIdAuthor | Berggren, Karl K. | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | ELECTRON-BEAM LITHOGRAPHY | - |
dc.subject.keywordPlus | SILSESQUIOXANE | - |
dc.subject.keywordPlus | NANOSTRUCTURES | - |
dc.subject.keywordPlus | FABRICATION | - |
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