Spray-Coated Liquid Metal Reflectors for Transparent Hydrogel Atomic Force Microscope Cantilevers

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This letter reports optical-lever detection with spray-coated liquid metal reflectors for transparent hydrogel atomic force microscope (AFM) cantilevers. Eutectic gallium-indium (EGaIn) filled in an air brush was locally sprayed over poly(ethylene) glycol-diacrylate (PEG-DA) AFM cantilevers with a shadow mask. Oxygen plasma treatment for bare hydrogel cantilevers prior to the EGaIn spray was shown to improve the wetting characteristics between EGaIn and PEG-DA, thus enabled relatively thin coating of similar to 800 nm within similar to 100 ms. PEG-DA AFM cantilevers coated with EGaIn were underwent mechanical characterization, and were employed for AFM imaging in both air and deionized (DI) water. Except the reflectivity degraded down to 40% of the initial value after 1-h dwell in DI water, their overall performance was comparable with those of PEG-DA AFM cantilevers with solid metal reflectors.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2016-10
Language
English
Article Type
Article
Citation

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.25, no.5, pp.848 - 850

ISSN
1057-7157
DOI
10.1109/JMEMS.2016.2589539
URI
http://hdl.handle.net/10203/245452
Appears in Collection
ME-Journal Papers(저널논문)
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