High Precision Measurement of 3D Profile Using Confocal Differential Heterodyne Interferometer

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The differential heterodyne interferometer (DHI) is suitable for precise measurement of step height and line width, since its differential configuration can significantly reduce disturbances from the environment [1,2]. Like most phase measuring interferometers, however, the DHI is limited, in that it can obtain only the phase from 0 to 2π, because of the sinusoidal nature of the optical interference involved. Thus, the measurable step height is limited to one quarter of the wavelength of the light source. This study describes a confocal differential heterodyne interferometer (CDHI) for measuring step heights of several micrometers, with a high resolution and line width with high repeatability. The CDHI has a simple structure and rapid measurement speed.
Publisher
한국광학회
Issue Date
2005-03
Language
English
Citation

JOURNAL OF THE OPTICAL SOCIETY OF KOREA, v.9, no.1, pp.22 - 25

ISSN
1226-4776
URI
http://hdl.handle.net/10203/24374
Appears in Collection
ME-Journal Papers(저널논문)
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