DC Field | Value | Language |
---|---|---|
dc.contributor.author | TaeJoong Kim | ko |
dc.contributor.author | Dae-Gab Gweon | ko |
dc.contributor.author | SeungWoo Lee | ko |
dc.date.accessioned | 2011-07-04T05:31:44Z | - |
dc.date.available | 2011-07-04T05:31:44Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2005-03 | - |
dc.identifier.citation | JOURNAL OF THE OPTICAL SOCIETY OF KOREA, v.9, no.1, pp.22 - 25 | - |
dc.identifier.issn | 1226-4776 | - |
dc.identifier.uri | http://hdl.handle.net/10203/24374 | - |
dc.description.abstract | The differential heterodyne interferometer (DHI) is suitable for precise measurement of step height and line width, since its differential configuration can significantly reduce disturbances from the environment [1,2]. Like most phase measuring interferometers, however, the DHI is limited, in that it can obtain only the phase from 0 to 2π, because of the sinusoidal nature of the optical interference involved. Thus, the measurable step height is limited to one quarter of the wavelength of the light source. This study describes a confocal differential heterodyne interferometer (CDHI) for measuring step heights of several micrometers, with a high resolution and line width with high repeatability. The CDHI has a simple structure and rapid measurement speed. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | 한국광학회 | - |
dc.title | High Precision Measurement of 3D Profile Using Confocal Differential Heterodyne Interferometer | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 9 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 22 | - |
dc.citation.endingpage | 25 | - |
dc.citation.publicationname | JOURNAL OF THE OPTICAL SOCIETY OF KOREA | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Dae-Gab Gweon | - |
dc.contributor.nonIdAuthor | TaeJoong Kim | - |
dc.contributor.nonIdAuthor | SeungWoo Lee | - |
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