#### Mechanical property evaluation and fracture behavior analysis of brittle thin films = 취성 박막의 기계적 물성 평가 및 파괴 거동 분석

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Two methods, top down and bottom up, exist in fabricating brittle thin films. The essence in determining the mechanical properties of brittle thin films are effect of size and direction which is included in single crystal material for top down method and deposition temperature for bottom up method. Direct tensile tests were performed on silicon thin films of 10, 20 50, $100 \mu m$ in thickness, which was fabricated by thinning technology of grinding the single crystal silicon wafer, in order to determine the size effect on the mechanical properties of thin brittle films. In addition, changes of mechanical properties with various directions such as <110>, <320>, <210>, and <100> are also investigated. Furthermore, deposition temperature was set to 80, 100, 150, 200, and $250^\circ C$ and tensile test was executed on the water surface for aluminum oxide thin film of 140nm in thickness, which was fabricated using ALD, in order to identify the effect of deposition temperature on mechanical properties of thin films. Therefore, the purpose of this particular research is to examine the influence of size, direction and deposition temperature on the mechanical properties of thin films.
Kim, Taek-Sooresearcher김택수researcher
Description
한국과학기술원 :기계공학과,
Publisher
한국과학기술원
Issue Date
2017
Identifier
325007
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 기계공학과, 2017.2,[vi, 56 p. :]

Keywords

brittle thin film; mechanical property; top down; bottom up; size effect; deposition temperature; 취성박막; 기계적 성질; 탑다운; 바텀업; 크기효과; 결정 방향; 증착온도

URI
http://hdl.handle.net/10203/242852