DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jeon, Sanghun | ko |
dc.contributor.author | Benayad, Anass | ko |
dc.contributor.author | Ahn, Seung-Eon | ko |
dc.contributor.author | Park, Sungho | ko |
dc.contributor.author | Song, Ihun | ko |
dc.contributor.author | Kim, Changjung | ko |
dc.contributor.author | Chung, U-In | ko |
dc.date.accessioned | 2018-03-21T02:56:36Z | - |
dc.date.available | 2018-03-21T02:56:36Z | - |
dc.date.created | 2018-03-07 | - |
dc.date.created | 2018-03-07 | - |
dc.date.issued | 2011-08 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.99, no.8 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/240827 | - |
dc.description.abstract | Short channel device performance of deep-submicron gate length oxide thin film transistor (TFT) with amorphous InGaZnO (a-IGZO) active semiconductor is presented. Remarkable electrical properties of short channel oxide TFT were achieved utilizing crucial structure and material optimization such as self aligned gate structure with homo junction, multi-channel with rounded corners, and high-kappa gate dielectric. It was found that various device performance parameters of short channel-oxide TFTs were significantly influenced by materials, processes, and structural geometry, which should be more carefully designed. (C) 2011 American Institute of Physics. [doi:10.1063/1.3623426] | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | TRANSPARENT | - |
dc.subject | MEMORY | - |
dc.title | Short channel device performance of amorphous InGaZnO thin film transistor | - |
dc.type | Article | - |
dc.identifier.wosid | 000294359100032 | - |
dc.identifier.scopusid | 2-s2.0-80052404420 | - |
dc.type.rims | ART | - |
dc.citation.volume | 99 | - |
dc.citation.issue | 8 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.3623426 | - |
dc.contributor.localauthor | Jeon, Sanghun | - |
dc.contributor.nonIdAuthor | Benayad, Anass | - |
dc.contributor.nonIdAuthor | Ahn, Seung-Eon | - |
dc.contributor.nonIdAuthor | Park, Sungho | - |
dc.contributor.nonIdAuthor | Song, Ihun | - |
dc.contributor.nonIdAuthor | Kim, Changjung | - |
dc.contributor.nonIdAuthor | Chung, U-In | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | TRANSPARENT | - |
dc.subject.keywordPlus | MEMORY | - |
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