DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kang, Kibum | ko |
dc.contributor.author | Lee, Kan-Heng | ko |
dc.contributor.author | Han, Yimo | ko |
dc.contributor.author | Gao, Hui | ko |
dc.contributor.author | Xie, Saien | ko |
dc.contributor.author | Muller, David A. | ko |
dc.contributor.author | Park, Jiwoong | ko |
dc.date.accessioned | 2018-01-30T04:20:51Z | - |
dc.date.available | 2018-01-30T04:20:51Z | - |
dc.date.created | 2018-01-09 | - |
dc.date.created | 2018-01-09 | - |
dc.date.issued | 2017-10 | - |
dc.identifier.citation | NATURE, v.550, no.7675, pp.229 - 233 | - |
dc.identifier.issn | 0028-0836 | - |
dc.identifier.uri | http://hdl.handle.net/10203/238836 | - |
dc.description.abstract | High-performance semiconductor films with vertical compositions that are designed to atomic-scale precision provide the foundation for modern integrated circuitry and novel materials discovery(1-3). One approach to realizing such films is sequential layer-by-layer assembly, whereby atomically thin two-dimensional building blocks are vertically stacked, and held together by van der Waals interactions'. With this approach, graphene and transition-metal dichalcogenides-which represent one- and three -atom-thick two-dimensional building blocks, respectively have been used to realize previously inaccessible heterostructures with interesting physical properties(7-11). However, no large-scale assembly method exists at present that maintains the intrinsic properties of these two-dimensional building blocks while producing pristine interlayer interfaces(12-15), thus limiting the layer-by-layer assembly method to small-scale proof-of-concept demonstrations. Here we report the generation of wafer-scale semiconductor films with a very high level of spatial uniformity and pristine interfaces. The vertical composition and properties of these films are designed at the atomic scale using layer-by-layer assembly of two-dimensional building blocks under vacuum. We fabricate several large-scale, high-quality heterostructure films and devices, including superlattice films with vertical compositions designed layer-by-layer, batch-fabricated tunnel device arrays with resistances that can be tuned over four orders of magnitude, band-engineered heterostructure tunnel diodes, and millimetre-scale ultrathin membranes and windows. The stacked films are detachable, suspendable and compatible with water or plastic surfaces, which will enable their integration with advanced optical and mechanical systems. | - |
dc.language | English | - |
dc.publisher | NATURE PUBLISHING GROUP | - |
dc.subject | DER-WAALS HETEROSTRUCTURES | - |
dc.subject | GRAPHENE | - |
dc.subject | CRYSTALS | - |
dc.subject | FILMS | - |
dc.subject | LASER | - |
dc.title | Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures | - |
dc.type | Article | - |
dc.identifier.wosid | 000412829500043 | - |
dc.identifier.scopusid | 2-s2.0-85031309721 | - |
dc.type.rims | ART | - |
dc.citation.volume | 550 | - |
dc.citation.issue | 7675 | - |
dc.citation.beginningpage | 229 | - |
dc.citation.endingpage | 233 | - |
dc.citation.publicationname | NATURE | - |
dc.identifier.doi | 10.1038/nature23905 | - |
dc.contributor.localauthor | Kang, Kibum | - |
dc.contributor.nonIdAuthor | Lee, Kan-Heng | - |
dc.contributor.nonIdAuthor | Han, Yimo | - |
dc.contributor.nonIdAuthor | Gao, Hui | - |
dc.contributor.nonIdAuthor | Xie, Saien | - |
dc.contributor.nonIdAuthor | Muller, David A. | - |
dc.contributor.nonIdAuthor | Park, Jiwoong | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | DER-WAALS HETEROSTRUCTURES | - |
dc.subject.keywordPlus | GRAPHENE | - |
dc.subject.keywordPlus | CRYSTALS | - |
dc.subject.keywordPlus | FILMS | - |
dc.subject.keywordPlus | LASER | - |
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