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An audio frequency filter application of micromachined thermally-isolated diaphragm structures Lee, KH; Lee, HK; Byun, HJ; Cho, IJ; Bu, JU; Yoon, Euisik, SENSORS AND ACTUATORS A-PHYSICAL, v.89, no.1-2, pp.49 - 55, 2001-03 |
Thermally driven thin film bulk acoustic resonator voltage controlled oscillators integrated with microheater elements Lee, HM; Kim, HT; Choi, HK; Hong, HK; Lee, DH; Park, JY; Bu, JU; et al, JAPANESE JOURNAL OF APPLIED PHYSICS, v.43, no.1A-B, pp.L85 - L87, 2004-01 |
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