Browse "RIMS Collection" by Author X. Y. Qian
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| Spatial Distribution of Thin Oxide Changing in Reactive Ion Etcher and MERIE Etcher H. Shin; K. Noguchi; X. Y. Qian; N. jha; G. W. Hills; C. Hu, IEEE ELECTRON DEVICE LETTERS, v.14, no.2, pp.88 - 90, 1993-02 |
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