플라즈마 처리장치 및 플라즈마 처리방법PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

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Assignee
KAIST
Country
CH (Switzerland)
Issue Date
2014-09-11
Application Date
2008-02-05
Application Number
097104726
Registration Date
2014-09-11
Registration Number
I452945
URI
http://hdl.handle.net/10203/229527
Appears in Collection
PH-Patent(특허)
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