플라즈마 처리장치 및 플라즈마 처리방법PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 장홍영 | ko |
| dc.contributor.author | 황태영 | ko |
| dc.date.accessioned | 2017-12-20T01:19:15Z | - |
| dc.date.available | 2017-12-20T01:19:15Z | - |
| dc.date.issued | 2014-09-11 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/229527 | - |
| dc.title | 플라즈마 처리장치 및 플라즈마 처리방법 | - |
| dc.title.alternative | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | - |
| dc.type | Patent | - |
| dc.type.rims | PAT | - |
| dc.contributor.localauthor | 장홍영 | - |
| dc.contributor.nonIdAuthor | 황태영 | - |
| dc.contributor.assignee | KAIST | - |
| dc.identifier.iprsType | 특허 | - |
| dc.identifier.patentApplicationNumber | 097104726 | - |
| dc.identifier.patentRegistrationNumber | I452945 | - |
| dc.date.application | 2008-02-05 | - |
| dc.date.registration | 2014-09-11 | - |
| dc.publisher.country | CH | - |
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