DC Field | Value | Language |
---|---|---|
dc.contributor.author | Duy Phong Pham | ko |
dc.contributor.author | Park, Jinjoo | ko |
dc.contributor.author | Shin, Chonghoon | ko |
dc.contributor.author | Kim, Sangho | ko |
dc.contributor.author | Nam, Yonghyun | ko |
dc.contributor.author | Kim, Geunho | ko |
dc.contributor.author | Kim, Minsik | ko |
dc.contributor.author | Yi, Junsin | ko |
dc.date.accessioned | 2017-12-19T03:00:29Z | - |
dc.date.available | 2017-12-19T03:00:29Z | - |
dc.date.created | 2017-12-11 | - |
dc.date.created | 2017-12-11 | - |
dc.date.issued | 2018-02 | - |
dc.identifier.citation | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.74, pp.165 - 169 | - |
dc.identifier.issn | 1369-8001 | - |
dc.identifier.uri | http://hdl.handle.net/10203/228564 | - |
dc.description.abstract | Silicon materials have been widely used as thermo-sensing layers in infrared detectors or uncooled micro-bolometers. Parameters such as a large thermal coefficient of resistance (TCR), low sheet resistance (R-s), and low 1/ f noise are important for high performance of these devices. However, there is always a trade-off between these parameters. For example, the crystalline silicon materials typically exhibit low R-s and 1/f noise, and significantly low TCR, while the amorphous silicon materials generally have large TCR, and considerably high Rs and 1/ f noise. Consequently, the best trade-off can be achieved by using a mixed-phase structure of silicon materials, i. e. an intermediate form between the crystalline and amorphous structures. Herein we report the important characteristics of hydrogenated mixed-phase silicon films, deposited by the plasma-enhanced chemical vapour deposition process, for infrared detectors. The films in the mixed-phase structure showed high TCR values in the range of 2-3% K-1 and moderate sheet resistances in range of 10-40 M Omega sq(-)1. These results indicate that the mixed-phase silicon films are potential alternatives to conventional boron doped hydrogenated amorphous and microcrystalline silicon films for use as thermo-sensing layers in infrared detectors. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCI LTD | - |
dc.subject | COOLED MICRO-BOLOMETERS | - |
dc.subject | GERMANIUM THIN-FILMS | - |
dc.subject | POLYMORPHOUS SILICON | - |
dc.subject | RAMAN-SPECTROSCOPY | - |
dc.subject | AMORPHOUS-SILICON | - |
dc.subject | DEPOSITION | - |
dc.subject | PLASMA | - |
dc.subject | POLYCRYSTALLINE | - |
dc.subject | NANOCRYSTALS | - |
dc.subject | NOISE | - |
dc.title | Boron-doped hydrogenated mixed-phase silicon as thermo-sensing films for infrared detectors | - |
dc.type | Article | - |
dc.identifier.wosid | 000415924400023 | - |
dc.identifier.scopusid | 2-s2.0-85032270169 | - |
dc.type.rims | ART | - |
dc.citation.volume | 74 | - |
dc.citation.beginningpage | 165 | - |
dc.citation.endingpage | 169 | - |
dc.citation.publicationname | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | - |
dc.identifier.doi | 10.1016/j.mssp.2017.10.034 | - |
dc.contributor.nonIdAuthor | Duy Phong Pham | - |
dc.contributor.nonIdAuthor | Park, Jinjoo | - |
dc.contributor.nonIdAuthor | Shin, Chonghoon | - |
dc.contributor.nonIdAuthor | Kim, Sangho | - |
dc.contributor.nonIdAuthor | Nam, Yonghyun | - |
dc.contributor.nonIdAuthor | Kim, Geunho | - |
dc.contributor.nonIdAuthor | Yi, Junsin | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Micro-bolometers | - |
dc.subject.keywordAuthor | Infrared detectors | - |
dc.subject.keywordAuthor | Boron-doped | - |
dc.subject.keywordAuthor | Hydrogenated silicon films | - |
dc.subject.keywordPlus | COOLED MICRO-BOLOMETERS | - |
dc.subject.keywordPlus | GERMANIUM THIN-FILMS | - |
dc.subject.keywordPlus | POLYMORPHOUS SILICON | - |
dc.subject.keywordPlus | RAMAN-SPECTROSCOPY | - |
dc.subject.keywordPlus | AMORPHOUS-SILICON | - |
dc.subject.keywordPlus | DEPOSITION | - |
dc.subject.keywordPlus | PLASMA | - |
dc.subject.keywordPlus | POLYCRYSTALLINE | - |
dc.subject.keywordPlus | NANOCRYSTALS | - |
dc.subject.keywordPlus | NOISE | - |
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