Full 3D-3C velocity measurement inside a liquid immersion droplet

Abstract

We describe a tomographic PIV system for the measurement of the internal flow in a droplet over a stagnant and a moving surface. The flow condition is representative of the flow in an immersion droplet applied in a liquid immersion lithography machine. We quantify the accuracy and reliability of the measurements and compare the shape of the reconstructed measurement volume to shape measurements by means of shadowgraphy. First results indicate the internal flow pattern near the receding contact line, showing a small recirculation region.