A new resistive probe with higher resolution

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We have proposed a new apex shaped semiconductor probe with resistive tip. Its improved characteristics are shown by using three-dimensional simulation tool (SILVACOtrade).
Publisher
IEEE Nanotechnology Council
Issue Date
2006-10
Language
English
Citation

2006 IEEE Nanotechnology Materials and Devices Conference, pp.114 - 115

DOI
10.1109/NMDC.2006.4388710
URI
http://hdl.handle.net/10203/220074
Appears in Collection
MS-Conference Papers(학술회의논문)
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