Design Sensitivity Analysis for the Performance Improvement of High-Q MEMS Resonators

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Publisher
AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference
Issue Date
2002-04
Language
English
Citation

AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference

URI
http://hdl.handle.net/10203/216915
Appears in Collection
ME-Conference Papers(학술회의논문)
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