DSpace at KOASAS: Design Sensitivity Analysis for the Performance Improvement of High-Q MEMS Resonators

DSpace at KOASAS

College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Design Sensitivity Analysis for the Performance Improvement of High-Q MEMS Resonators

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Park, Yong Hwa researcher / Park, KC researcher

Publisher: AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference

Issue Date: 2002-04

Language: English

Citation: AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference

URI: http://hdl.handle.net/10203/216915

Appears in Collection: ME-Conference Papers(학술회의논문)

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