Design Sensitivity Analysis for the Performance Improvement of High-Q MEMS Resonators

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dc.contributor.authorPark, Yong Hwa-
dc.contributor.authorPark, KC-
dc.date.accessioned2017-01-11T10:57:50Z-
dc.date.available2017-01-11T10:57:50Z-
dc.date.created2016-12-21-
dc.date.issued2002-04-
dc.identifier.citationAIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference-
dc.identifier.urihttp://hdl.handle.net/10203/216915-
dc.languageEnglish-
dc.publisherAIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference-
dc.titleDesign Sensitivity Analysis for the Performance Improvement of High-Q MEMS Resonators-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameAIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationDenver, Colorado-
dc.contributor.localauthorPark, Yong Hwa-
dc.contributor.nonIdAuthorPark, KC-
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ME-Conference Papers(학술회의논문)
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