DC 마그네트론 스퍼터링으로 제작된 NiFe 박막에서 Ar 압력이 자기 및 자기저항성질에 미치는 영향The Effects of Ar Gas Pressure on Thin Films Prepared by dc Magnetron Sputtering

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dc.contributor.author민병철ko
dc.contributor.author신성철ko
dc.date.accessioned2011-01-07T04:47:06Z-
dc.date.available2011-01-07T04:47:06Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1996-04-
dc.identifier.citation한국자기학회지, v.6, no.2, pp.98 - 104-
dc.identifier.urihttp://hdl.handle.net/10203/21462-
dc.languageKorean-
dc.language.isokoen
dc.publisher한국자기학회지-
dc.titleDC 마그네트론 스퍼터링으로 제작된 NiFe 박막에서 Ar 압력이 자기 및 자기저항성질에 미치는 영향-
dc.title.alternativeThe Effects of Ar Gas Pressure on Thin Films Prepared by dc Magnetron Sputtering-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume6-
dc.citation.issue2-
dc.citation.beginningpage98-
dc.citation.endingpage104-
dc.citation.publicationname한국자기학회지-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthor신성철-
dc.contributor.nonIdAuthor민병철-
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