FILM STRESS-RELATED VACANCY SUPERSATURATION IN SILICON UNDER LOW-PRESSURE CHEMICAL VAPOR-DEPOSITED SILICON-NITRIDE FILMS
- Publisher
- AMER INST PHYSICS
- Issue Date
- 1988-11
- Language
- English
- Article Type
- Article
- Citation
JOURNAL OF APPLIED PHYSICS, v.64, no.10, pp.4914 - 4919
- ISSN
- 0021-8979
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
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