Spin coating nanopatterned multielemental materials via self-assembled nanotemplates

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Spin coating of multicomponent precursor solutions was employed in conjunction with block copolymer nanotemplates to fabricate nanopatterned functional multielemental materials. Nanodot and nanowire arrays of several multielemental materials exhibiting optoelectronic and multiferroic properties have been fabricated on various substrates to demonstrate the versatility of our approach. The shape, size and density of nanopatterned multielemental materials can be tuned in a variety of ways. This low cost and large scale solution nanopatterning process without a harsh etching step may offer a new opportunity for development of ultrahigh density device nanostructures.
Publisher
IOP PUBLISHING LTD
Issue Date
2009-06
Language
English
Article Type
Article
Keywords

BLOCK-COPOLYMER LITHOGRAPHY; THIN-FILM TRANSISTORS; OPTICAL-PROPERTIES; BEAM LITHOGRAPHY; ROOM-TEMPERATURE; ARRAYS; ZNO; NANOSTRUCTURES; FABRICATION; TEMPLATES

Citation

NANOTECHNOLOGY, v.20, no.22

ISSN
0957-4484
DOI
10.1088/0957-4484/20/22/225301
URI
http://hdl.handle.net/10203/20535
Appears in Collection
MS-Journal Papers(저널논문)
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