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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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EFFECTS OF DEPOSITION TEMPERATURE ON THE ELECTRICAL-PROPERTIES OF ELECTRON-CYCLOTRON-RESONANCE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION TA2O5 FILM AND THE FORMATION OF INTERFACIAL SIO2 KIM, I; KIM, JS; CHO, BW; AHN, SD; Chun , Soung Soon; Lee, Won-Jong, JOURNAL OF MATERIALS RESEARCH, v.10, no.11, pp.2864 - 2869, 1995-11 |