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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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THE EFFECTS OF DEPOSITION VARIABLES ON DEPOSITION RATE IN THE CHEMICAL VAPOR-DEPOSITION OF SILICON-NITRIDE YI, KS; KIM, JB; KIM, KJ; Chun , Soung Soon, THIN SOLID FILMS, v.155, no.1, pp.87 - 95, 1987-12 |
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