Browse "RIMS Journal Papers" by Author G. W. Hills
Showing results 1 to 2 of 2
| Plasma Etching Charge-up Damage to Thin Oxides H. Shin; N. jha; X. Y. Qian; G. W. Hills; C. Hu, SOLID STATE TECHNOLOGY, v.36, no.8, pp.29 - 36, 1993-08 |
| Spatial Distribution of Thin Oxide Changing in Reactive Ion Etcher and MERIE Etcher H. Shin; K. Noguchi; X. Y. Qian; N. jha; G. W. Hills; C. Hu, IEEE ELECTRON DEVICE LETTERS, v.14, no.2, pp.88 - 90, 1993-02 |
Discover
Type
- 4,767 Article
Open Access
- 223 OA Article
Date issued
- 984 2020 - 2024
- 1,492 2010 - 2019
- 1,145 2000 - 2009
- 763 1990 - 1999
- 299 1980 - 1989
- 3 1964 - 1969