DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoon, Sung-Min | ko |
dc.contributor.author | Park, Sang-Hee Ko | ko |
dc.contributor.author | Hwang, Chi-Sun | ko |
dc.contributor.author | Chu, Hye Yong | ko |
dc.contributor.author | Cho, Kyoung Ik | ko |
dc.date.accessioned | 2015-11-20T12:57:13Z | - |
dc.date.available | 2015-11-20T12:57:13Z | - |
dc.date.created | 2014-04-21 | - |
dc.date.created | 2014-04-21 | - |
dc.date.issued | 2008 | - |
dc.identifier.citation | ELECTROCHEMICAL AND SOLID STATE LETTERS, v.11, no.2, pp.15 - 18 | - |
dc.identifier.issn | 1099-0062 | - |
dc.identifier.uri | http://hdl.handle.net/10203/201793 | - |
dc.description.abstract | In this paper, we describe a newly developed dry etching process for the fabrication of ZnO-based oxide thin-film transistors (TFTs). The dry etching behavior of ZnO and Al2O3 thin films was systematically investigated by varying the etching gas mixtures and their mixing ratios in a dry etching system using high-density helicon plasma. We fabricated an oxide TFT using an Al2O3/ZnO gate stack patterned by dry etching and confirmed good device characteristics, in which the field effect mobility and the ratio of on/off drain currents were about 0.8 cm(2)/(V s) and 10(7), respectively. (c) 2007 The Electrochemical Society. | - |
dc.language | English | - |
dc.publisher | ELECTROCHEMICAL SOC INC | - |
dc.subject | INDUCTIVELY-COUPLED PLASMA | - |
dc.subject | THIN-FILM TRANSISTORS | - |
dc.subject | ZNO | - |
dc.title | Fabrication of oxide TFTs with Al2O3/ZnO gate stacks patterned using a dry etching method | - |
dc.type | Article | - |
dc.identifier.wosid | 000251907400024 | - |
dc.identifier.scopusid | 2-s2.0-37549034283 | - |
dc.type.rims | ART | - |
dc.citation.volume | 11 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 15 | - |
dc.citation.endingpage | 18 | - |
dc.citation.publicationname | ELECTROCHEMICAL AND SOLID STATE LETTERS | - |
dc.identifier.doi | 10.1149/1.2817483 | - |
dc.contributor.localauthor | Park, Sang-Hee Ko | - |
dc.contributor.nonIdAuthor | Yoon, Sung-Min | - |
dc.contributor.nonIdAuthor | Hwang, Chi-Sun | - |
dc.contributor.nonIdAuthor | Chu, Hye Yong | - |
dc.contributor.nonIdAuthor | Cho, Kyoung Ik | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | INDUCTIVELY-COUPLED PLASMA | - |
dc.subject.keywordPlus | THIN-FILM TRANSISTORS | - |
dc.subject.keywordPlus | ZNO | - |
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