DC Field | Value | Language |
---|---|---|
dc.contributor.author | 임형준 | ko |
dc.contributor.author | 이재종 | ko |
dc.contributor.author | 최기봉 | ko |
dc.contributor.author | 김기홍 | ko |
dc.contributor.author | 이성휘 | ko |
dc.date.accessioned | 2015-11-20T12:30:55Z | - |
dc.date.available | 2015-11-20T12:30:55Z | - |
dc.date.created | 2014-01-15 | - |
dc.date.created | 2014-01-15 | - |
dc.date.issued | 2013-10 | - |
dc.identifier.citation | 한국기계가공학회지, v.12, no.5, pp.1 - 8 | - |
dc.identifier.issn | 1598-6721 | - |
dc.identifier.uri | http://hdl.handle.net/10203/201519 | - |
dc.description.abstract | Roll-based, nanoimprint lithography (Roll-NIL) is one effective method to produce large-area nanopatterns continuously. Systems and processes for Roll-NIL have been developed and studied for more than 15 years. Since the shapes of the stamp and the substrate for Roll-NIL can be plates, films, and rolls, there exist many concepts to design and implement roll-NIL systems. Combinations and variations of contact-methods for variously shaped stamps and substrates are analyzed in this paper. The contact-area can be changed by using soft materials such as polydimethylsiloxane (PDMS) or silicone rubber. Ultraviolet (UV) sources appropriate for the roll-to-plate or roll-to-roll process are introduced. Finally, two roll-to-plate nanoimprint lithography systems are illustrated. | - |
dc.language | Korean | - |
dc.publisher | 한국기계가공학회 | - |
dc.title | 롤 기반 나노임프린트 리소그래피 시스템 기술 | - |
dc.title.alternative | Technology for Roll-based Nanoimprint Lithography Systems | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 12 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 1 | - |
dc.citation.endingpage | 8 | - |
dc.citation.publicationname | 한국기계가공학회지 | - |
dc.identifier.kciid | ART001817159 | - |
dc.contributor.localauthor | 임형준 | - |
dc.contributor.nonIdAuthor | 이재종 | - |
dc.contributor.nonIdAuthor | 최기봉 | - |
dc.contributor.nonIdAuthor | 김기홍 | - |
dc.contributor.nonIdAuthor | 이성휘 | - |
dc.subject.keywordAuthor | Nanoimprint Lithography | - |
dc.subject.keywordAuthor | Roll | - |
dc.subject.keywordAuthor | Patterning | - |
dc.subject.keywordAuthor | 나노임프린트 리소그래피 | - |
dc.subject.keywordAuthor | 롤 | - |
dc.subject.keywordAuthor | 패터닝 | - |
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