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Fabrication of Vertical Silicon Nanotube Array Using Spacer Patterning Technique and Metal-Assisted Chemical Etching Jeong, Hyeon Ho; Lee, Junghyung; Bok, Cheolkyu; Lee, Seok-Hee; Yoo, Seunghyup, IEEE TRANSACTIONS ON NANOTECHNOLOGY, v.16, no.1, pp.130 - 134, 2017-01 |
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