Browse "School of Electrical Engineering(전기및전자공학부)" by Subject Plasma-enhanced atomic layer deposition (PEALD)
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| Performance Improvement of N-Type TiOx Active-Channel TFTs Grown by Low-Temperature Plasma-Enhanced ALD Park, JW; Lee, D; Kwon, H; Yoo, Seunghyup; Huh, J, IEEE ELECTRON DEVICE LETTERS, v.30, no.7, pp.739 - 741, 2009-07 |
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