Showing results 7 to 11 of 11
PVP/GO:Graphene/polymer composite film as a Cu diffusion barrier Kim, Jae Hwan; Yoon, Seong Jun; Bong, Jae Hoon; Yoon, Alexander; Cho, Byung Jin, The 8th International Conference on Recent Progress in Graphene/2D Research, SKKU Advanced Institute of Nano Technology, 2016-09-27 |
Selective Pore-Sealing of Highly Porous Ultralow-k dielectrics for ULSI Interconnects by Cyclic Initiated Chemical Vapor Deposition Process Yoon, Seong Jun; Pak, Kwanyong; Ahn, Hyun Jun; Yoon, Alexander; Im, Sung Gap; Cho, Byung Jin, 38th IEEE Symposium on VLSI Technology, pp.73 - 74, IEEE, 2018-06 |
Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with Ultrathin (<2 nm) Polymer Coating Yoon, Seong Jun; Pak, Kwanyong; Taewook Nam; Yoon, Alexander; Kim, Hyungjun; Im, Sung Gap; Cho, Byung Jin, ACS NANO, v.11, no.8, pp.7841 - 7847, 2017-08 |
Ultrathin graphene and graphene oxide layers as a diffusion barrier for advanced Cu metallization Bong, Jae Hoon; Yoon, Seong Jun; Yoon, Alexander; Hwang, Wan Sik; Cho, Byung-Jin, APPLIED PHYSICS LETTERS, v.106, no.6, 2015-02 |
개시제를 통한 고분자 기상증착기법을 활용한 다공성 초절연물질 (k = 2.0) 표면 실링 방법 윤성준; 박관용; 남태욱; Yoon, Alexander; 김형준; 임성갑; 조병진, 24th Korean Conference on Semiconductors, SK Hynix, 2017-02-15 |
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