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Deposition of Highly Conductive Boron-Doped Microcrystalline Silicon-Carbide (p-mc-SiC:H) Thin Film by RF-PECVD Kwon, SW; Kwak, JH; Myong, SY; Lee, JC; Kim, SK; Park, IJ; Yoon, KH; et al, E-MRS Spring Meeting 2003, 2003 |
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