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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Deposition of Highly Conductive Boron-Doped Microcrystalline Silicon-Carbide (p-mc-SiC:H) Thin Film by RF-PECVD

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Kwon, SW / Kwak, JH / Myong, SY / Lee, JC / Kim, SK / Park, IJ / Yoon, KH / Lim, Koeng Suresearcher
Issue Date
2003
Language
ENG
Citation

E-MRS Spring Meeting 2003

URI
http://hdl.handle.net/10203/148859
Appears in Collection
EE-Conference Papers(학술회의논문)
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