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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Deposition of Highly Conductive Boron-Doped Microcrystalline Silicon-Carbide (p-mc-SiC:H) Thin Film by RF-PECVD

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dc.contributor.authorKwon, SW-
dc.contributor.authorKwak, JH-
dc.contributor.authorMyong, SY-
dc.contributor.authorLee, JC-
dc.contributor.authorKim, SK-
dc.contributor.authorPark, IJ-
dc.contributor.authorYoon, KH-
dc.contributor.authorLim, Koeng Su-
dc.date.accessioned2013-03-18T13:30:41Z-
dc.date.available2013-03-18T13:30:41Z-
dc.date.created2012-02-06-
dc.date.issued2003-
dc.identifier.citationE-MRS Spring Meeting 2003, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/148859-
dc.languageENG-
dc.titleDeposition of Highly Conductive Boron-Doped Microcrystalline Silicon-Carbide (p-mc-SiC:H) Thin Film by RF-PECVD-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameE-MRS Spring Meeting 2003-
dc.identifier.conferencecountryFrance-
dc.identifier.conferencecountryFrance-
dc.contributor.localauthorLim, Koeng Su-
dc.contributor.nonIdAuthorKwon, SW-
dc.contributor.nonIdAuthorKwak, JH-
dc.contributor.nonIdAuthorMyong, SY-
dc.contributor.nonIdAuthorLee, JC-
dc.contributor.nonIdAuthorKim, SK-
dc.contributor.nonIdAuthorPark, IJ-
dc.contributor.nonIdAuthorYoon, KH-
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EE-Conference Papers(학술회의논문)
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