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A high fill-factor infrared bolometer using micromachined multilevel electrothermal structures Lee, HK; Yoon, Jun-Bo; Yoon, E; Ju, SB; Yong, YJ; Lee, W; Kim, SG, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.46, no.7, pp.1489 - 1491, 1999-07 |
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