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Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen Park, K. K.; Lee, Hyunjoo Jenny; Yaralioglu, G. G.; Ergun, A. S.; Oralkan, O; Kupnik, M.; Quate, C. F.; et al, APPLIED PHYSICS LETTERS, v.91, no.9, 2007-08 |
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