Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen

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The authors present the prototype of a chemical sensor using a capacitive micromachined ultrasonic transducer array. Each element in the array consists of a large number of resonating membranes connected in parallel. A five-channel oscillator circuit operates at the resonant frequency around 6 MHz in this prototype. The surface of the elements in the array is coated by polymers such as polyallylamine hydrochloride, polyethylene glycol, and polyvinyl alcohol to detect different chemicals. By measuring shift in oscillation frequencies due to the mass-loading effect, analytes, e.g., water and isopropanol, with concentrations around 20 ppbv (parts per 10(9) by volume) range can be detected. (C) 2007 American Institute of Physics.
Publisher
AMER INST PHYSICS
Issue Date
2007-08
Language
English
Article Type
Article
Citation

APPLIED PHYSICS LETTERS, v.91, no.9

ISSN
0003-6951
DOI
10.1063/1.2776348
URI
http://hdl.handle.net/10203/202972
Appears in Collection
EE-Journal Papers(저널논문)
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