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Thermal Conductivity and Thermal Boundary Resistances of ALD Al2O3 Films on Si and Sapphire Lee, Seung-Min; Choi, Won Chul; Kim, Junsoo; Kim, Taekwang; Lee, Jaewoo; Im, Sol Yee; Kwon, Jung Yoon; et al, INTERNATIONAL JOURNAL OF THERMOPHYSICS, v.38, no.176, 2017-12 |
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