CHEMICAL-VAPOR-DEPOSITION; NANOPOROUS POLY(METHYL SILSESQUIOXANE); LOW-K DIELECTRICS; THIN-FILMS; MESOPOROUS SILICA; CONSTANT MATERIALS; REFRACTIVE-INDEX; MULTILAYER FILMS; GLOW-DISCHARGES; ZEOLITE FILMS
RSC ADVANCES, v.4, no.54, pp.28409 - 28416
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