Browse "Dept. of Nuclear and Quantum Engineering(원자력및양자공학과)" by Author Chung, CW
Showing results 1 to 2 of 2
| Electron temperature and density variation due to temporal evolution of nano particle growth in RE silane plasma Chai, KB; Seon, CR; Choe, Wonho; Park, S; Chung, CW, 5th International Conference on the Physics of Dusty Plasmas, pp.175 - 176, 123, 2008-05-18 |
| Plasma parameter dependence of critical particle size at the moment of void formation in RF silane plasmas Seon, CR; Chai, KB; Choe, Wonho; Park, S; Chung, CW, 5th International Conference on the Physics of Dusty Plasmas, pp.177 - 178, 2008-05-18 |
Discover
Type
- 2,830 Article
- 5,616 Conference
- 430 Patent
- 932 Thesis(Master)
- 564 Thesis(Ph.D)
Open Access
- 152 OA Article
Date issued
- 1,303 2020 - 2024
- 4,359 2010 - 2019
- 2,657 2000 - 2009
- 1,431 1990 - 1999
- 449 1980 - 1989