DSpace at KOASAS: Plasma parameter dependence of critical particle size at the moment of void formation in RF silane plasmas

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College of Engineering(공과대학)Dept. of Nuclear and Quantum Engineering(원자력및양자공학과)NE-Conference Papers(학술회의논문)

Plasma parameter dependence of critical particle size at the moment of void formation in RF silane plasmas

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Seon, CR / Chai, KB / Choe, Wonho researcher / Park, S / Chung, CW

Issue Date: 2008-05-18

Language: ENG

Citation: 5th International Conference on the Physics of Dusty Plasmas, pp.177 - 178

URI: http://hdl.handle.net/10203/158869

Appears in Collection: NE-Conference Papers(학술회의논문)

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Plasma parameter dependence of critical particle size at the moment of void formation in RF silane plasmas

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