DC Field | Value | Language |
---|---|---|
dc.contributor.author | Seon, CR | - |
dc.contributor.author | Chai, KB | - |
dc.contributor.author | Choe, Wonho | - |
dc.contributor.author | Park, S | - |
dc.contributor.author | Chung, CW | - |
dc.date.accessioned | 2013-03-27T03:58:35Z | - |
dc.date.available | 2013-03-27T03:58:35Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2008-05-18 | - |
dc.identifier.citation | 5th International Conference on the Physics of Dusty Plasmas, v., no., pp.177 - 178 | - |
dc.identifier.uri | http://hdl.handle.net/10203/158869 | - |
dc.language | ENG | - |
dc.title | Plasma parameter dependence of critical particle size at the moment of void formation in RF silane plasmas | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-54049129688 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 177 | - |
dc.citation.endingpage | 178 | - |
dc.citation.publicationname | 5th International Conference on the Physics of Dusty Plasmas | - |
dc.identifier.conferencecountry | Portugal | - |
dc.identifier.conferencecountry | Portugal | - |
dc.contributor.localauthor | Choe, Wonho | - |
dc.contributor.nonIdAuthor | Seon, CR | - |
dc.contributor.nonIdAuthor | Chai, KB | - |
dc.contributor.nonIdAuthor | Park, S | - |
dc.contributor.nonIdAuthor | Chung, CW | - |
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