Fabrication of 3D ZnO hollow shell structures by prism holographic lithography and atomic layer deposition

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Highly uniform 3D ZnO hollow shell structures were prepared by combining prism holographic lithography (PHL) and atomic layer deposition (ALD). As a dense ZnO film was obtained by using the ALD process, no volume shrinkage occurred during the subsequent calcination to remove the sacrificial polymer template. No volume shrinkage during heat treatment is crucial for achieving excellent optical properties and mechanical stability of inverse photonic crystals (PCs).
Publisher
ROYAL SOC CHEMISTRY
Issue Date
2014
Language
English
Article Type
Article
Keywords

PHOTONIC CRYSTALS; PIEZOELECTRIC NANOGENERATORS; POLYMER TEMPLATES; SOLAR-CELL; GAS SENSOR; ELECTRODEPOSITION; ARRAYS; OPALS

Citation

JOURNAL OF MATERIALS CHEMISTRY C, v.2, no.11, pp.1957 - 1961

ISSN
2050-7526
DOI
10.1039/c3tc32366h
URI
http://hdl.handle.net/10203/188822
Appears in Collection
CBE-Journal Papers(저널논문)
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