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College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

Optimal scheduling of transient cycles for single-armed cluster tools

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Kim, Dae-Kyu / Lee, Tae-Eogresearcher / Kim, Hyun-Jung
Publisher
IEEE
Issue Date
2013-08-17
Language
ENG
Citation

IEEE International Conference on Automation Science and Engineering, pp.874 - 879

ISSN
2161-8070
DOI
10.1109/CoASE.2013.6653939
URI
http://hdl.handle.net/10203/188037
Appears in Collection
IE-Conference Papers(학술회의논문)

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